Wang, Zheng; Gui, Xiaoyan; Cheng, Lin; Wu, Nanjian Source: Journal of Semiconductors, v 45, n 6, June 2024; ISSN: 16744926; DOI: 10.1088/1674-4926/24050901; Article number: 060101; Publisher: Institute of Physics

Author affiliation:

School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu; 611731, China

School of Microelectronics, Xi’an Jiaotong University, Xi’an; 710049, China

School of Microelectronics, University of Science and Technology of China, Hefei; 230026, China

Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China