Wu, Honghao; Li, Wenchang; Liu, Jian; Hong, Ting; Zhang, Tianyi Source: IEICE Electronics Express, v 21, n 1, 2024;

Abstract:

An integrated sensor for temperature (Temp) and humidity (RH) measurement is designed. The temperature and humidity (T/H) sensing probe are combined with one first-order discrete-time Σ-？ analog-to-digital converter (ADC). Also, a new ample architecture of ADC is proposed, ADC selects a reasonable reference voltage according to varied range of T/H signals. Therefore, the dynamic range utilization rate of ADC is improved. The proposed sensor is designed and fabricated in 0.153 μm CMOS technology. The experimental results show that the T/H sensor achieves a ？0.9~0.6% RH measurement accuracy in the humidity range of 10~90% RH, and ±0.4C temperature measurement accuracy in the temperature range of ？40~120C.

Copyright ？ 2024 The Institute of Electronics, Information and Communication Engineers (31 refs.)