Wang, Minglu; Zheng, Wanhua; Liu, Anjin Source: 2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings, ACP/POEM 2023, 2023, 2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings, ACP/POEM 2023;

Abstract:

We design and fabricate a tunable micro-electro-mechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL) at 940-nm range. The MEMS-VCSEL uses a movable high-contrast grating (HCG) mirror to replace the top semiconductor distributed Bragg reflector (DBR) of the common VCSEL. By applying a reverse voltage across the air layer, the HCG moves downward under the electrostatic force, thereby changing the wavelength of the MEMS-VCSEL. Theoretically, the MEMS-VCSEL with this structure can achieve a maximum wavelength tuning range of over 30 nm. At present, we have realized a tuning range of 3.7 nm at room temperature.

？ 2023 IEEE. (12 refs.)